The BGV basement gate valves are a range of stainless steel, bellows-sealed basement isolation valves. They have been designed, in conjunction with VAT, to enable pumps to be kept running during foreline maintenance in order to maximise the reliability and up-time of pumps operating on harsh processes.
The BGV valves are designed for an operating pressure range of 1 x 10-9 mbar to 1.2 bar absolute (1 x 10-7 to 1.2 x 105 Pa). The valves withstand 1.2 bar absolute in either direction and can tolerate against a 1 bar differential pressure across the valve seal.
Although principally designed for isolation of pumps in a semiconductor fab basement, the BGV valves are ideal for other applications where a 1 bar differential at opening is desirable and 20000 cycles is acceptable.